RIM TECHNOLOGY INC

Products (Copy)

Products

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Ceramic

  • Alumina (Al2O3)

  • Aluminum Nitride (ALN)

  • Silicon Carbide (SiC)

  • Yittria (Y2O3)

  • Zirconia (ZrO3

 

Part Description

  • Gas Distribution Plate (GDP)

  • Focus Ring

  • Edge Ring

  • Insulator Ring

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SIlicon

  • Single Crystal Silicon

  • Poly Crystal Silicon

 

Part Description

  • Upper Electrode

  • Focus Ring

  • Insert Ring

  • Collar Ring

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Quartz

  • General Quartz

  • Synthetic Quartz



 

Part Description

  • Shadow Ring

  • Edge Ring

  • Shield Ring

  • WIndow

  • Insulator